Photo Sciences, Inc.

the best of fast track with added versatility

For those customers requiring photomasks that don’t fit the Fast Track parameters we have fast Track plus. Fast Track Plus allows you to get the same low, fixed prices and reliable delivery for masters that meet the normal Fast Track requirements while adding other services, such as digitizing and contact prints. Fast Track Plus also allows you to get masters with smaller features and tighter tolerances than are available on Fast Track.

Reliable Fast Track masters, with other products and services available
The same low, fixed prices* as Fast Track for the Laser Pattern Generated masters which meet the same parameters as standard Fast Track masters*
Masters ready to ship or move on for additional processing within 48 hours of approved data (72 hours for 7” masters and all Iron Oxide masters)*
CAD and digitizing available (additional charges and delivery time will be quoted)*
Contact prints available (additional charges and delivery time will be quoted)*
Pellicles available (additional charges and delivery time will be quoted)*
Smaller features and tighter tolerances than are available on Fast Track*
Free mask cleaning*
Free mask re-inspection and certification*

*Some restrictions apply.

fast track plus product matrix

Product Summary

Mask:

1X Chrome and Iron Oxide Master (4” to 7”), which requires the specifications outside the parameter of the Fast Track Program.
Chrome and Iron Oxide Reprints (4” to 6”).
Automatic measurements and defect inspection performed upon request.
PSI will add a P.C.M. (Process Control Monitors) and measure it as C.D. (Critical Dimension) when a Customer does not specify his or her C.D.
If a Customer requires that PSI measure specific C.D., he or she must supply a plot of these C.D. locations and/or X,Y coordinate values. PSI will manually measure up to 5 C.D. locations at no additional cost.
C.D. features should not be circles, curved or angular features, or larger than 20 microns; however, if a Customer requires PSI to measure them, these measurements will be based on best effort only.
only.

Data:

GDS, DXF, DWG, BMP, CIF, PG and other drawing formats are accepted for Fast Track Plus Products.
Digitizing, conversion, and other various data editing services are available.
Plots or Data can be provided for Customer’s approval.
Data center (0,0) must match plate center.
The area within 0.250” (6.35mm) from the edge of the plate is reserved for PSI’s P.C.M. and Serialization; therefore, the mask’s active data area (including text) should be contained within the remaining area.
File Name (for all data formats) as well as Top Structure Name (only for GDSII) should not contain any space(s) between characters or invalid characters.
Customer must supply data or drawing(s) and specifications necessary to build masks.

Inspection:

Visual measurements and inspection as well as defect repair for all masks unless automatic measurements and inspection are requested.
Automatic measurements and inspection are available at additional cost.
Visual measurements, inspection and repair only for Chrome Reprints and Iron Oxide Masters/Reprints.
Metrology tools are calibrated with relevant traceable standards.
Iron Oxide features will be measured on tools calibrated with Chrome standard artifacts.

Product Specifications

Product Specifications (Units in Microns):

Chrome
Specifications		Master	Reprint
C.D.:		Please contact Photo Sciences, Inc.	2.0 minimum
C.D. Tolerance (±):		Please contact Photo Sciences, Inc.	2X Master (0.5 min.)
C.D. Uniformity (±):		Please contact Photo Sciences, Inc.	2X Master (0.5 min.)
Registration (±) (layer-to-layer):	SL	Please contact Photo Sciences, Inc.	2X Master (0.5 min.)
Registration (±) (layer-to-layer):	QZ	Please contact Photo Sciences, Inc.	2X Master (0.5 min.)
Registration (±) (die-to-grid):	SL	Please contact Photo Sciences, Inc.	2X Master (1.0 min.)
Registration (±) (die-to-grid):	QZ	Please contact Photo Sciences, Inc.	2X Master (0.5 min.)
Defect:		* 0>5.0, 0>3.0, 0>1.0, 0>0.5	* 0>5.0

Iron Oxide
Specifications		Master	Reprint
C.D.:		2.5 minimum	3.0 minimum
C.D. Tolerance (±):	4”-6”	≥ 0.35	2X Chrome Master (0.75 min.)
C.D. Tolerance (±):	7”	Not Available	Not Available
C.D. Uniformity (±):	4”-6”	≥ 0.35	2X Chrome Master (0.75 min.)
C.D. Uniformity (±):	7”	Not Available	Not Available
Registration (±) (layer-to-layer):	SL	≥ 0.5	2X Chrome Master (0.75 min.)
Registration (±) (layer-to-layer):	QZ	≥ 0.35	2X Chrome Master (1.0 min.)
Registration (±) (die-to-grid):	SL	≥ 0.75	2X Chrome Master (0.75 min.)
Registration (±) (die-to-grid):	QZ	≥ 0.4	2X Chrome Master (1.0 min.)
Defect:		* 0>10.0	* 0>10.0

* Visual Inspection and Repair Only for the Defects on Iron Oxide Masks.

Various Design Patterns

Fast Track + includes any data that contain the following patterns with the dimensions listed below, which cannot be resolved under our other program, Fast Track.

Circles (Dia.) / Rings (Width)	Squares	Stripes	Waveguides
< 3.0 m	< 3.0 m	< 2.5 m	Any dimensions