| fast track product matrix |
fast track photomasks
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Product Summary
Mask:
- 1X Chrome or Iron Oxide Master (4” to 7”) ready to ship in the turn time listed below after the data is fracture-ready, or the mask will be FREE. The guaranteed delivery might be temporarily suspended from time to time due to machine maintenance and repair issues. During these times when the guarantee is suspended, Photo Sciences will make every effort to adhere to the normal Fast Track delivery parameters. Customer will be notified at the time his or her order is placed. The cut-off time for sending in new orders, including data, is 3:00 PM PST. Orders received after 3:00 PM will count as being received the following business day.
- PSI will add a P.C.M. (Process Control Monitor) and measure it as C.D.
- If a customer requires that PSI measure specific C.D. (up to 5 locations), he or she must supply a plot of these C.D. locations and/or X,Y coordinate values.
- C.D. features should not be circles, curved or angular features, or larger than 20 microns; however, if a customer requires PSI to measure them, these measurements will be based on best effort only.
Data:
- Fast Track CAD engineer previews the data. If the data has no issues or errors, we will proceed with the order and the customer will receive order confirmation with the delivery information. If the data has issues or errors, our CAD engineer will contact the customer to discuss them. Customer will then have the option of repairing the data himself/herself or have PSI repair the data at an hourly rate of $125.00.
- CAD charges at an hourly rate of $125.00 will apply for any data editing such as adding special text, die serialization, biasing, and/or Boolean function. Quotation will be provided for any necessary CAD work.
- GDS, DXF, or PG data are the only accepted data formats for Fast Track Products. Other data formats may require CAD charges for data preparation/setup.
- Data center (0,0) must match plate center.
- The area within 0.250” (6.35mm) from the edge of the plate is reserved for PSI’s P.C.M. and Serialization; therefore, the mask’s active data area (including text) should be contained within the remaining area.
- Maximum number of features in a data file is 25 Million.
- Maximum data file byte size is 150 MB.
- Filename (for all data formats) as well as Top Structure Name (only for GDSII) should not contain any space(s) between characters or invalid characters.
- PSI requires fresh data for new or repeat orders.
- Customer must supply data and specifications necessary to build masks.
Inspection:
- Visual inspection and defect repair only for all Fast Track masks.
- Metrology tools are calibrated with relevant traceable standards.
- Iron Oxide features will be measured on tools calibrated with Chrome standard artifacts.
Product Specifications
(Units in Microns):
Chrome |
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* Write Tool: |
L10 |
L625 |
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C.D. (P.C.M.): |
3.0 |
2.0 |
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C.D. Tolerance (±): |
0.5 |
0.25 |
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C.D. Uniformity (±): |
0.5 |
0.25 |
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Registration (±) |
SL |
0.5 |
0.5 |
QZ |
0.35 |
0.3 |
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Registration (±) |
SL |
0.75 |
0.75 |
QZ |
0.6 |
0.5 |
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Defect: |
0>5.0 |
0>5.0 |
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Iron Oxide |
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* Write Tool: |
L10 |
L625 |
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C.D. (P.C.M.): |
4.0 |
3.0 |
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C.D. Tolerance (±): |
4”-6” |
0.5 |
0.5 |
7” |
No Longer Available |
No Longer Available |
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C.D. Uniformity (±): |
0.5 |
0.5 |
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Registration (±) |
SL |
0.75 |
0.75 |
QZ |
0.5 |
0.5 |
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Registration (±) |
SL |
0.75 |
0.75 |
QZ |
0.6 |
0.5 |
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Defect: |
0>10.0 |
0>10.0 |
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* Write Tool: Please note that the Write Tool, L625, is able to achieve a better Line Edge Acuity than L10 (Line Edge Acuity = the smoothness of the line edges). It is recommended that a Product Code designated for L625 should be chosen for the data that contain circles, rings, arcs, angles, squares and/or stripes that are equal to or larger than the dimensions listed below. Please select an appropriate Product Code for your mask based on your specific mask requirements.
Restrictions
Restrictions:
The following Table shows the smallest dimension for Circles, Rings, Squares, Angular Lines, Stripes and/or Tapered Lines that can be resolved using a specific Write Tool (L10 or L625). Please select an appropriate Write Tool (L10 or L625) based on the Table below if your data contain any of these patterns mentioned. Additionally, our Fast Track Program does not guarantee to resolve Waveguides effectively.
Write Tool |
Circles (Diameter) or Rings (Width) |
Squares |
Angular Lines |
Stripes or Tapered Lines |
Waveguides |
L10 |
³ 5.0 m |
³ 5.0 m |
³ 5.0 m |
³ 3.0 m |
Not Recommended |
L625 |
³ 3.0 m |
³ 3.0 m |
³ 3.0 m |
³ 2.5 m |
Not Recommended |
Please contact Fast Track Department at (310) 784-7460 or fasttrack@photo-sciences.com if you have any questions regarding specification requirements and capabilities.
Note: We no longer offer 7”X7”X.090” Iron Oxide Soda Lime Masks under our Fast Track Program.